DocumentCode
2018136
Title
Novel functionality using micro-gaseous devices
Author
Nathanson, Harvey C. ; Liberman, Irv ; Freidhoff, Carl
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
72
Keywords
Displays; Electrostatics; Gallium arsenide; Micromechanical devices; Mirrors; Optical devices; Optical modulation; Optical transmitters; Switches; Transmission line matrix methods;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472551
Filename
472551
Link To Document