Title :
Optimized 60-V Lateral Dmos Devices for Vlsi Power Applications
Author :
Oh-Kyong Kwon ; Efland, T. ; Wal Tung Ng ; Malhi, S. ; Todd, R. ; Lee, J.K.
Author_Institution :
Semiconductor Process and Design Center, Texas Instruments Inc.
Keywords :
Conductivity; Driver circuits; Fabrication; Instruments; Logic devices; Power integrated circuits; Process design; Proximity effect; Very large scale integration; Voltage;
Conference_Titel :
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location :
Oiso, Japan
DOI :
10.1109/VLSIT.1991.706017