High concentration ozone by means of coplanar discharge

Summary form only given, as follows. We have studied coplanar electric discharge as a new barrier electric discharge This electric discharge system is formed between high-voltage electrodes and low-voltage electrodes in one side of a glass substrate by screen-printing at fixed interval. Both electrodes are covered by dielectrics. The electrode of one sheet is based on the size of printing equipment and it can be possible also for the 50 in. class of diagonal for a large-scale ozonizer. It is used also for the plasma display panel and the accuracy between electrodes, high-voltage and low-voltage is manufactured and managed very well. This discharge method can form a uniform electric discharge in the whole surface. The electric discharge is formed on this electrode surface and ozone generates. Moreover, the gas temperature was maintained at low temperature by cooling the other side of a glass substrate and the thermal decomposition of ozone is controlled. We have developed the industrial coplanar electric discharge type ozonizer by stacking this electrode.