DocumentCode

2018370

Title

Devices for particle handling by an AC electric field

Author

Moesner, Felix M. ; Higuchi, Toshiro

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

66

Keywords

Electric fields; Electrodes; Electrostatics; Frequency; Machinery; Protection; Robots; Surface cleaning; Transportation; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

conf

DOI

10.1109/MEMSYS.1995.472552

Filename

472552