Title :
Current pulse effect on 2-T inductively coupled plasma
Author_Institution :
Ushio Inc., Shizuoka, Japan
Abstract :
Summary form only given, as follows. I describe a non-LTE model that can be useful in studying non-equilibrated situations of rf-ICP under any externally applied transitions with practically matched situation of an rf-current input. The time-dependent model solves the transport equations of mass, momentum and energy equations along with the vector potential form of Maxwell´s equations in 2-T (electron and heavy particle temperature) approach using the SIMPLER algorithm. The temperatures thus obtained are used to calculate the particle densities, which are used to calculate the material properties of plasma, at each and every grids of the ICP torch. The particle densities are calculated accounting species up to single ionization Calculations are done for a 2-D, axisymmetric ICP torch that is surrounded by an rf current-carrying coil of 8 turns and 144 mm length The operating argon gas pressure is 1 atmospheric pressure and the pulsating current of the discharge is varied between 150 and 100 A at a duty factor of 67% with 10 ms pulsing on-time.
Keywords :
Maxwell equations; plasma density; plasma materials processing; plasma simulation; plasma sources; plasma temperature; plasma torches; plasma transport processes; 150 to 100 A; Maxwell´s equations; RF-current input; SIMPLER algorithm; axisymmetric torch; current pulse effect; electron temperature; externally applied transitions; industrial plasma; nonequilibrated situations; particle densities; radio-frequency inductively coupled plasma; single ionization; temporal temperature; time-dependent model; transport equations; vector potential form; Coils; Electrons; Ionization; Material properties; Maxwell equations; Plasma density; Plasma materials processing; Plasma properties; Plasma temperature; Plasma transport processes;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1228906