Title :
Deformable mirror display with continuous reflecting surface micromachined in silicon
Author :
Vdovin, Gleb ; Middelhoek, Simon ; Sarro, Lina
fDate :
29 Jan-2 Feb 1995
Keywords :
Biomembranes; Displays; Electrodes; Etching; Intensity modulation; Mirrors; Optical collimators; Optical modulation; Silicon; Voltage control;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472553
