• DocumentCode
    2018652
  • Title

    Deformable mirror display with continuous reflecting surface micromachined in silicon

  • Author

    Vdovin, Gleb ; Middelhoek, Simon ; Sarro, Lina

  • fYear
    1995
  • fDate
    29 Jan-2 Feb 1995
  • Firstpage
    61
  • Keywords
    Biomembranes; Displays; Electrodes; Etching; Intensity modulation; Mirrors; Optical collimators; Optical modulation; Silicon; Voltage control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
  • Print_ISBN
    0-7803-2503-6
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1995.472553
  • Filename
    472553
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2018652