Prototyping design and automation of micro/nano manipulation system

The micro/nano manipulation is the key technology to produce an integrated system as well as to examine the micro/nano world. For example, the micro/nano manipulation is needed for assembly and maintenance of the micro machines and their parts. It is also important for biology and bio-engineering field to explore the micro/nano world. The micro/nano manipulation is classified into the contact type and the non-contact type based on the manipulation method. The manipulation method and system depend on the manipulation environment and the observation system. System design and control methods are completely different depending on the size of the object and the manipulation environment. Here we present highlights on-going research works on the prototyping of the micro/nano manipulation system