DocumentCode :
2019241
Title :
A theoretical model, generation, and diagnostics of a large-volume plasma
Author :
Hong, Y.C. ; Lee, S.C. ; Uhm, H.S. ; Bae, K.H.
Author_Institution :
Dept. of Molecular Sci. & Technol., Ajou Univ., Suwon, South Korea
fYear :
2003
fDate :
5-5 June 2003
Firstpage :
339
Abstract :
Summary form only given, as follows. A simple, new scheme to generate a uniform, steady-state, large-volume plasma is presented. The weakly magnetized plasma, is created by direct ionization of the background gas by low-energy electrons generated from thermionic filaments, which are arranged annularly. In order to explain the experimental observations, we have developed a bulk plasma theory based on plasma transport cross-field diffusion. The bulk plasma experiment is conducted in a cylindrical stainless chamber with a radius of 50 cm and a length of 3 in. We measured the radial and axial profiles of plasma density with different discharge currents using a Langmuir probe. We also observed the experimental data to agree approximately with theoretical predictions.
Keywords :
Langmuir probes; ionisation; plasma density; plasma diagnostics; plasma sources; plasma transport processes; Langmuir probe; axial profiles; bulk plasma theory; direct ionization; large-volume plasma; low-energy electrons; plasma generation; plasma transport cross-field diffusion; radial profiles; thermionic filaments; weakly magnetized plasma; Current measurement; Density measurement; Electrons; Ionization; Plasma density; Plasma diagnostics; Plasma measurements; Plasma transport processes; Probes; Steady-state;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
ISSN :
0730-9244
Print_ISBN :
0-7803-7911-X
Type :
conf
DOI :
10.1109/PLASMA.2003.1228937
Filename :
1228937
Link To Document :
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