DocumentCode
2019388
Title
Planar electrooptic switches with PLZT deflectors hybrid integrated on Si substrates
Author
Yokouchi, Kishio ; Glebov, Alexei L. ; Lee, Michael G.
Author_Institution
Dept. of Adv. Optoelectron. Technol., Fujitsu Labs. of America Inc., Sunnyvale, CA, USA
Volume
2
fYear
2004
fDate
7-11 Nov. 2004
Firstpage
529
Abstract
Prototypes of electrooptic planar deflector switches are fabricated. Deflectors with epitaxial PLZT films are assembled on silica-on-silicon optical substrates. The switching operations are demonstrated at about 40 V and switching times less than 0.5 μs.
Keywords
electro-optical switches; epitaxial layers; integrated optics; integrated optoelectronics; lanthanum compounds; lead compounds; optical deflectors; optical fabrication; optical films; 40 V; PLZT; PLZT deflectors; PbLaZrO3TiO3; Si substrates; SiO2-Si; electrooptic switches; epitaxial PLZT films; hybrid integration; planar deflector switches; silica-on-silicon optical substrates; switching operations; Electrooptic deflectors; Electrooptical waveguides; Lenses; Microoptics; Optical arrays; Optical films; Optical waveguides; Slabs; Substrates; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN
0-7803-8557-8
Type
conf
DOI
10.1109/LEOS.2004.1363346
Filename
1363346
Link To Document