Effects of the collimator on the plasma parameters in a hyper-thermal neutral beam source

Summary form only given, as follows. Hyper-thermal neutral beam sources are developing for the next generation semiconductor manufacturing device. The collimator in the device contacts the plasma to extract ion beam and exchange the incident ion beam to neutral beam resulted in Auger effect on the collimator surface layer. Hence, the neutral beam energy is proportional to the voltage difference between the plasma potential and bias voltage on the collimator. However, the biased collimator affects on the plasma parameters, especially the plasma potential In this presentation, the effects of the collimator biasing on the plasma parameters have been investigated by using various diagnostics tools, Langmuir probe, capacitive probe, emissive probe and grid ion energy analyzer. Ar and He plasma were used for the research. In addition, the effects of the collimator´s physical size will be discussed on the plasma parameters.