Nonlinear equivalent circuit modeling for E to H mode transition in an inductive plasma source

Summary form only given, as follows. E to H mode transition is a typical nonlinear problem in an inductive Plasma sources. The mode transition has been explained in terms of power balance. In this presentation, the nonlinear equivalent circuit modeling has been studied. The linear transformer modeling has been used for inductive plasma source. However, linear transformer model can not explain the mode transition. The nonlinear circuit model based on the assumption that induction field is coupled nonlinearly to the plasma. When nonlinear coupling effects included in the linear transformer model, this nonlinear harmonic oscillation problem can be expressed by Duffing equation. The advantage of Duffing equation is hysteresis as well mode transition can be explained.