Title :
Surface acoustic wave atomizer with pumping effect
Author :
Kurosawa, Minoru ; Watanabe, Takayuki ; Higuchi, Toshiro
fDate :
29 Jan-2 Feb 1995
Keywords :
Acoustic materials; Acoustic waves; Acoustical engineering; Electrodes; Endoscopes; Frequency; Pumps; Surface acoustic wave devices; Surface acoustic waves; Surface waves;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472559
