DocumentCode

2020596

Title

A bidirectional silicon micropump

Author

Zengerle, R. ; Kluge, S. ; Richter, M. ; Richter, A.

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

19

Keywords

Chemical analysis; Chemical elements; Electrodes; Electrostatics; Frequency; Micropumps; Pumps; Silicon; Valves; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

conf

DOI

10.1109/MEMSYS.1995.472560

Filename

472560