DocumentCode
2020929
Title
Micromachined hydraulic astable multivibrator
Author
Lammerink, T.S.J. ; Tas, N.R. ; Berenschot, J.W. ; Elwenspoek, M.C. ; Fluitman, J.H.J.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
13
Keywords
Capacitors; Control systems; Coupling circuits; Filters; Inverters; Pressure control; Pumps; Resistors; Valves; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472561
Filename
472561
Link To Document