RF-MEMS phased array antenna on low-loss LTCC substrate for ka-band data link

In this paper, an electrically steerable antenna for communication at Ka-band is demonstrated. The antenna itself is a microstrip antenna array made out of low-loss LTCC (Low Temperature Co-fired Ceramics) DuPont 943 substrate. The antenna is made electrically steerable in the H-plane of the aperture by means of RF-MEMS phase shifters. The phase shifters are 3-bit phase shifters processed in the EADS Innovation Works RF-MEMS technology. They are integrated in a hybrid fashion onto the ceramic substrate of the antenna. The paper describes the different development steps of the complete phased array antenna, including the design of the antenna array, and the integration of the phase shifters. Finally, the design and the realisation of the phased antenna demonstrator are assessed and validated by satisfactory measurement results.