Title :
The fine patterning of diamond thin film
Author :
Mao, M.Y. ; Wang, T.P. ; Xie, J.F. ; Wang, W.Y.
fDate :
29 Jan-2 Feb 1995
Keywords :
Chemicals; Conductivity; Doping; Etching; Fabrication; Feeds; Micromotors; Silicon; Substrates; Transistors;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472565
