Title :
Silicon-on-insulator platform for WDM-components
Author :
Baets, Roel ; Dumon, Pieter ; Bogaerts, Wim ; Van Thourhout, Dries ; Taillaert, Dirk ; Luyssaert, Bert ; Bienstman, Peter ; Wiaux, Vincent ; Beckx, Stephen ; Wouters, Johan
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Gent, Belgium
Abstract :
The silicon-on-insulator (SOI) platform allows to make ultra-compact photonic circuits by means of standard processes used for advanced CMOS. Various WDM-components (filters and demultiplexers) based on high-contrast nanophotonic waveguides in SOI are reported.
Keywords :
arrayed waveguide gratings; demultiplexing equipment; integrated optics; integrated optoelectronics; micro-optics; multiplexing equipment; nanotechnology; optical communication equipment; optical design techniques; optical fabrication; optical filters; silicon-on-insulator; ultraviolet lithography; wavelength division multiplexing; CMOS; Si; WDM-components; demultiplexers; filters; high-contrast nanophotonic waveguides; silicon-on-insulator platform; ultracompact photonic circuits; Arrayed waveguide gratings; CMOS technology; Circuits; Couplings; Filters; Lithography; Photonics; Refractive index; Silicon on insulator technology; Wavelength division multiplexing;
Conference_Titel :
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN :
0-7803-8557-8
DOI :
10.1109/LEOS.2004.1363452
