Title :
High-Q integrated on-chip micro-ring resonator
Author :
Guo, Junpeng ; Shaw, Michael J. ; Vawter, G. Allen ; Esherick, Peter ; Hadley, G. Ronald ; Sullivan, Charles T.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
We report a fully integrated high-Q factor micro-ring resonator using silicon nitride/dioxide on a silicon wafer. The micro-ring resonator is critically coupled to a low loss straight waveguide. An intrinsic quality factor of 2.4×105 has been measured.
Keywords :
Mach-Zehnder interferometers; Q-factor; integrated optoelectronics; micro-optics; optical couplers; optical design techniques; optical fabrication; optical planar waveguides; optical resonators; Q factor; high-Q integrated on-chip microring resonator; quality factor; silicon dioxide; silicon nitride; silicon wafer; straight waveguide; Absorption; Annealing; Etching; Optical device fabrication; Optical losses; Optical resonators; Optical waveguides; Semiconductor films; Silicon compounds; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN :
0-7803-8557-8
DOI :
10.1109/LEOS.2004.1363454
