• DocumentCode
    2022025
  • Title

    High-Q integrated on-chip micro-ring resonator

  • Author

    Guo, Junpeng ; Shaw, Michael J. ; Vawter, G. Allen ; Esherick, Peter ; Hadley, G. Ronald ; Sullivan, Charles T.

  • Author_Institution
    Sandia Nat. Labs., Albuquerque, NM, USA
  • Volume
    2
  • fYear
    2004
  • fDate
    7-11 Nov. 2004
  • Firstpage
    745
  • Abstract
    We report a fully integrated high-Q factor micro-ring resonator using silicon nitride/dioxide on a silicon wafer. The micro-ring resonator is critically coupled to a low loss straight waveguide. An intrinsic quality factor of 2.4×105 has been measured.
  • Keywords
    Mach-Zehnder interferometers; Q-factor; integrated optoelectronics; micro-optics; optical couplers; optical design techniques; optical fabrication; optical planar waveguides; optical resonators; Q factor; high-Q integrated on-chip microring resonator; quality factor; silicon dioxide; silicon nitride; silicon wafer; straight waveguide; Absorption; Annealing; Etching; Optical device fabrication; Optical losses; Optical resonators; Optical waveguides; Semiconductor films; Silicon compounds; Waveguide lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
  • Print_ISBN
    0-7803-8557-8
  • Type

    conf

  • DOI
    10.1109/LEOS.2004.1363454
  • Filename
    1363454
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2022025