DocumentCode
2022049
Title
Add-drop filters utilizing vertically-coupled microdisk resonators in silicon
Author
Koonath, Prakash ; Indukuri, Tejaswi ; Jalali, Bahram
Author_Institution
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Volume
2
fYear
2004
fDate
7-11 Nov. 2004
Firstpage
747
Abstract
This paper reports the fabrication and characterization of add-drop filters based on vertically coupled microdisk resonators in silicon. SIMOX 3-D sculpting is the technique used to fabricate monolithically integrated filters based on microdisk resonator structures that show adjacent channel cross talk suppression as high as 15 dB for channels that are separated by 1.5 nm.
Keywords
integrated optics; micro-optics; monolithic integrated circuits; optical couplers; optical crosstalk; optical fabrication; optical filters; optical resonators; telecommunication channels; 1.5 nm; SIMOX 3-D sculpting; Si; add-drop filters; channel cross talk suppression; monolithically integrated filters; silicon; vertically-coupled microdisk resonators; Annealing; Etching; Lithography; Optical devices; Optical filters; Optical resonators; Optical waveguides; Oxygen; Resonator filters; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN
0-7803-8557-8
Type
conf
DOI
10.1109/LEOS.2004.1363455
Filename
1363455
Link To Document