Title :
UV-induced modification of dielectric properties of polymers for fabrication of passive planar lightwave circuits
Author :
Henzi, Patric ; Rabus, Dominik G. ; Wallrabe, Ulrike ; Mohr, Juergen
Author_Institution :
Inst. for Microstructure Technol., Forschungszentrum Karlsruhe GmbH, Germany
Abstract :
Deep UV-induced refractive index modification of polymers is used for realizing integrated optical circuits. This technology enables the integration in a micro-optical bench for combining the planar lightwave circuits with alignment structures.
Keywords :
dielectric materials; micro-optics; optical design techniques; optical fabrication; optical planar waveguides; optical polymers; refractive index; ultraviolet lithography; deep UV-induced refractive index modification; dielectric properties; integrated optical circuits; microoptical bench; passive planar lightwave circuits; polymers; Costs; Dielectrics; Fabrication; Integrated circuit technology; Optical polymers; Optical sensors; Optical surface waves; Optical waveguides; Planar waveguides; Refractive index;
Conference_Titel :
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN :
0-7803-8557-8
DOI :
10.1109/LEOS.2004.1363478
