Title :
Performance impact of monolayer coating of polysilicon micromotors
Author :
Deng, Kai ; Collins, Rochael J. ; Mehregany, Mehran ; Sukenik, Chaim N.
fDate :
29 Jan-2 Feb 1995
Keywords :
Coatings; Flanges; Friction; Gears; Micromotors; Rotors; Silicon; Stators; Surface treatment; Testing;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472568
