• DocumentCode
    2022858
  • Title

    Partially depleted CMOS SOI technology for low power RF applications

  • Author

    Tinella, C. ; Gianesello, F. ; Gloria, D. ; Raynaud, C. ; Delatte, P. ; Engelstein, A. ; Fournier, J.M. ; Benech, Ph. ; Jomaah, J.

  • Author_Institution
    FTM, STMicroelectronics, Crolles, France
  • fYear
    2005
  • fDate
    3-4 Oct. 2005
  • Firstpage
    101
  • Lastpage
    104
  • Abstract
    The low resistivity substrate that is used in bulk silicon processes (CMOS and BiCMOS) limits the integration of high-quality passives components and gives rise to severe substrate coupling issues. This paper shows how to take advantage of HR SOI to improve RF circuit performances as well as the effectiveness of HR SOI to reduce substrate coupling. Potentiality of mm-wave passive integration is also shown.
  • Keywords
    CMOS integrated circuits; passive networks; radiofrequency integrated circuits; silicon-on-insulator; substrates; BiCMOS; CMOS SOI technology; RF circuit; Si; bulk silicon processes; high-quality passives components; low power RF applications; mm-wave passive integration; substrate coupling; BiCMOS integrated circuits; CMOS process; CMOS technology; Conductivity; Coupling circuits; Inductors; Q factor; Radio frequency; Silicon; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Gallium Arsenide and Other Semiconductor Application Symposium, 2005. EGAAS 2005. European
  • Conference_Location
    Paris
  • Print_ISBN
    88-902012-0-7
  • Type

    conf

  • Filename
    1637160