• DocumentCode
    2022871
  • Title

    Bright ultrafast EUV sources for time-resolved absorption measurements

  • Author

    Nakano, Hidetoshi ; Oguri, Katsuya ; Nishikawa, Tadashi

  • Author_Institution
    NTT Basic Res. Labs., Kanagawa, Japan
  • Volume
    2
  • fYear
    2004
  • fDate
    7-11 Nov. 2004
  • Firstpage
    817
  • Abstract
    A cross-correlation method for measuring the EUV pulse duration using an optical-field induced ionization process in a noble gas is performed. The duration of the 51st harmonic at 15.56 nm was measured. Time-resolved EUV absorption measurements near the LII,III absorption edge (∼ 100 eV) of optically excited silicon is also performed using broadband picosecond EUV pulses emitted from femtosecond laser-produced plasma. A rapid change in the near-edge absorption of silicon is observed.
  • Keywords
    elemental semiconductors; optical correlation; optical harmonic generation; optical materials; optical pulse generation; photoionisation; plasma production by laser; silicon; time resolved spectra; ultraviolet sources; ultraviolet spectra; 15.56 nm; LII,III absorption edge; Si; femtosecond laser-produced plasma; noble gas; optical-field induced ionization process; optically excited silicon; time-resolved absorption measurements; ultrafast EUV sources; Absorption; Ionization; Optical pulses; Performance evaluation; Plasma measurements; Pulse measurements; Silicon; Stimulated emission; Ultrafast optics; Ultraviolet sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
  • Print_ISBN
    0-7803-8557-8
  • Type

    conf

  • DOI
    10.1109/LEOS.2004.1363491
  • Filename
    1363491