• DocumentCode
    2023088
  • Title

    Dome-shaped diaphragm microtransducers

  • Author

    Zhang, Horig ; Kim, Eun

  • fYear
    1995
  • fDate
    29 Jan-2 Feb 1995
  • Firstpage
    256
  • Keywords
    Acoustic sensors; Acoustic transducers; Acoustic waves; Electrodes; Microphones; Piezoelectric films; Piezoelectric transducers; Silicon; Surface acoustic waves; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
  • Print_ISBN
    0-7803-2503-6
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1995.472570
  • Filename
    472570
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2023088