Title :
Dome-shaped diaphragm microtransducers
Author :
Zhang, Horig ; Kim, Eun
fDate :
29 Jan-2 Feb 1995
Keywords :
Acoustic sensors; Acoustic transducers; Acoustic waves; Electrodes; Microphones; Piezoelectric films; Piezoelectric transducers; Silicon; Surface acoustic waves; Zinc oxide;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472570
