Self-aligned machining and assembly of high aspect ratio microparts into silicon

Author

Langen, H.H. ; Masuzawa, T. ; Fujino, M.

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

250

Keywords

Assembly; Fabrication; Machining; Metals industry; Micromechanical devices; Micromotors; Prototypes; Silicon; Skeleton; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

DOI

10.1109/MEMSYS.1995.472571

Filename

472571

Link To Document