• DocumentCode
    2023586
  • Title

    Nd:KGW planar waveguides on silicon substrate for integrated active optical devices

  • Author

    Okato, T. ; Obara, M. ; Atanasov, P.A. ; Tomov, R.I.

  • Author_Institution
    Dept. of Electron. & Electr. Eng., Keio Univ., Yokohama, Japan
  • Volume
    2
  • fYear
    2004
  • fDate
    7-11 Nov. 2004
  • Firstpage
    861
  • Abstract
    This study presents the fabrication of Nd:KGW films on CeO2/Si by use of conventional PLD. A further improvement of the Nd:KGW laser waveguide by use of newly developed nozzle-gas-assisted PLD (NGA-PLD) method is presented.
  • Keywords
    buffer layers; cerium compounds; neodymium; optical fabrication; optical films; optical planar waveguides; pulsed laser deposition; silicon; waveguide lasers; KGd(WO4)2:Nd; Nd:KGW planar waveguides; Si; integrated active optical devices; laser waveguide; nozzle-gas-assisted PLD; silicon substrate; Buffer layers; Optical devices; Optical planar waveguides; Optical waveguides; Planar waveguides; Pulsed laser deposition; Semiconductor films; Silicon; Substrates; Waveguide lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
  • Print_ISBN
    0-7803-8557-8
  • Type

    conf

  • DOI
    10.1109/LEOS.2004.1363513
  • Filename
    1363513