Title :
CMOS compatible modulation of 1.5-micron light using silicon nanocrystals
Author :
Bickford, Justin ; Bambha, Neal ; Preble, Stefan
Author_Institution :
US Army Res. Lab., Adelphi, MD, USA
Abstract :
We report Plasma Enhanced Chemical Vapor Deposition (PECVD) growth and optical characterization of Silicon nanocrystals on fuzed quartz, and present a low voltage ultrafast CMOS compatible modulator design utilizing the DC Kerr electro-optic effect.
Keywords :
CMOS integrated circuits; Kerr electro-optical effect; electro-optical modulation; elemental semiconductors; integrated optoelectronics; nanofabrication; nanophotonics; nanostructured materials; optical design techniques; plasma CVD; semiconductor growth; semiconductor thin films; silicon; 1.5-micron light; CMOS compatible modulation; DC Kerr electro-optic effect; PECVD growth; Si; SiO2; fuzed quartz; low voltage ultrafast CMOS compatible modulator design; optical characterization; plasma enhanced chemical vapor deposition; silicon nanocrystals; size 1.5 micron; Annealing; Indexes; Nanocrystals; Optical modulation; Silicon; Temperature measurement;
Conference_Titel :
Avionics, Fiber- Optics and Photonics Technology Conference (AVFOP), 2012 IEEE
Conference_Location :
Cocoa Beach, FL
Print_ISBN :
978-1-4577-0757-5
DOI :
10.1109/AVFOP.2012.6344035
