Closed form inductance calculation for integrated spiral inductor compact modeling

Circuit simulation of RF circuits with on silicon chip spiral inductors would benefit strongly from an accurate and scalable closed-form expression for the inductance. A simple expression for inductance is also necessary for initial inductor design. In this paper, we present such a closed-form physics-based expression. The accuracy of the expression is evaluated by comparison with measurement data. It is shown that our expression is more accurate than previously published expressions, and, moreover, since being physics-based, it is scalable. That is demonstrated by comparison with the measured inductance for a complete set of inductors with different layout parameters.