DocumentCode
2025150
Title
MEMS for pressure distribution studies of gaseous flows in microchannels
Author
Liu, Jianqiang ; Yu-chong Tai ; Chih-Ming HoKin-Cheonk Pong
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
209
Keywords
Boundary conditions; Fabrication; Fluid flow; Fluid flow measurement; Geometry; Microchannel; Microfluidics; Micromachining; Micromechanical devices; Sensor systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472578
Filename
472578
Link To Document