Study of MEMS gas sensor and its packaging

In this paper, the gas sensor is fabricated by micro electronic mechanical system(MEMS) technique and printing technique with functional SWCNTs. The measured electrode is formed on the silicon substrate by lithography, deposition and etch. Then the nanoparticles decorated SWCNTs solution is deposited onto the electrode gap by printing technology. This gas sensor chip is cut and fixed on the chip carrier, and the pad of gas sensor is connected with the chip carrier by gold wire bonding. The functional single-walled carbon nanotube based sensor shows excellent sensing properties at room temperature.