Thermo-mechanical structures for the optimisation of silicon micromachined gas sensors

Author

Gotz, A. ; Gràcia, L. ; Cane, C. ; Ozano, M.L. ; Lora-Tamayo, E.

Author_Institution

Centro Nacional de Microelectron., Bellaterra, Spain

fYear

2000

fDate

2000

Firstpage

90

Lastpage

94

Abstract

Thermal and mechanical characterisation has been carried out on simple test structures that allow the optimisation of the size, power consumption and mechanical robustness of thermally isolated membranes for semiconductor gas sensors fabricated on silicon micromachined substrates. Breakdown pressure, working temperature and heat distribution are the parameters that have been considered of interest for the development of the sensor structures.

Keywords

elemental semiconductors; gas sensors; heat losses; internal stresses; membranes; microsensors; optimisation; power consumption; semiconductor device reliability; semiconductor device testing; silicon; temperature distribution; FEM simulation; Si; breakdown pressure; heat distribution; heat losses; mechanical characterisation; mechanical integrity; mechanical robustness; membrane size; micromachined gas sensors; optimisation; power consumption; semiconductor gas sensors; test chip; thermal characterisation; thermally isolated membranes; thermomechanical structures; working temperature; Biomembranes; Electric breakdown; Energy consumption; Gas detectors; Robustness; Semiconductor device testing; Silicon; Substrates; Temperature sensors; Thermomechanical processes;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 2000. ICMTS 2000. Proceedings of the 2000 International Conference on

Print_ISBN

0-7803-6275-7

Type

conf

DOI

10.1109/ICMTS.2000.844411

Filename

844411