DocumentCode
2025897
Title
Advanced web-based process control for czochralski silicon growth
Author
Hui Zhang ; Lili Zheng
Author_Institution
Stony Brook University
fYear
2002
fDate
19-19 June 2002
Firstpage
133
Lastpage
133
Keywords
Artificial neural networks; Coils; Cooling; Linear approximation; Neural networks; Power engineering and energy; Predictive models; Process control; Silicon; Temperature control;
fLanguage
English
Publisher
ieee
Conference_Titel
Control and Automation, 2002. ICCA. Final Program and Book of Abstracts. The 2002 International Conference on
Conference_Location
Xiamen, Fujian Province, China
Print_ISBN
0-7803-7412-6
Type
conf
DOI
10.1109/ICCA.2002.1229432
Filename
1229432
Link To Document