DocumentCode
2026235
Title
Embedded compact test structure with a comparator for rapid device characteristic measurement
Author
Goto, Junichi ; Kuwabara, Syota ; Tsujide, T.
Author_Institution
Device Anal. Technol. Labs., NEC Corp., Kawasaki, Japan
fYear
2000
fDate
2000
Firstpage
195
Lastpage
199
Abstract
The recent development of high performance LSIs requires a lot of expensive and time-consuming measurements of device characteristics at the process development stages. This paper introduces a new test structure to measure device characteristics with drastically reduced run-time and chip-area overheads, and also shows the possibility of unifying function tests and device characteristic measurements.
Keywords
comparators (circuits); integrated circuit testing; large scale integration; leakage currents; production testing; sample and hold circuits; chip-area overhead reduction; comparator; embedded compact test structure; function tests; high performance LSI devices; rapid device characteristic measurement; run-time reduction; Calibration; Circuit testing; Current measurement; Flowcharts; Integrated circuit measurements; Leakage current; Semiconductor device measurement; Signal analysis; Voltage; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 2000. ICMTS 2000. Proceedings of the 2000 International Conference on
Print_ISBN
0-7803-6275-7
Type
conf
DOI
10.1109/ICMTS.2000.844430
Filename
844430
Link To Document