Title :
Embedded compact test structure with a comparator for rapid device characteristic measurement
Author :
Goto, Junichi ; Kuwabara, Syota ; Tsujide, T.
Author_Institution :
Device Anal. Technol. Labs., NEC Corp., Kawasaki, Japan
Abstract :
The recent development of high performance LSIs requires a lot of expensive and time-consuming measurements of device characteristics at the process development stages. This paper introduces a new test structure to measure device characteristics with drastically reduced run-time and chip-area overheads, and also shows the possibility of unifying function tests and device characteristic measurements.
Keywords :
comparators (circuits); integrated circuit testing; large scale integration; leakage currents; production testing; sample and hold circuits; chip-area overhead reduction; comparator; embedded compact test structure; function tests; high performance LSI devices; rapid device characteristic measurement; run-time reduction; Calibration; Circuit testing; Current measurement; Flowcharts; Integrated circuit measurements; Leakage current; Semiconductor device measurement; Signal analysis; Voltage; Writing;
Conference_Titel :
Microelectronic Test Structures, 2000. ICMTS 2000. Proceedings of the 2000 International Conference on
Print_ISBN :
0-7803-6275-7
DOI :
10.1109/ICMTS.2000.844430
