Title :
RLC parasitic extraction and circuit model optimization for Cu/SiO/sub 2/-90 nm inductance structures
Author :
Hegazy, Hazem Mahmoud
Abstract :
An efficient interconnects modeling and optimization methodology is proposed for multi-GHz clock network design. High frequency effects, including inductance and proximity effects are captured. The results are validated through comparisons with electromagnetic simulations and measured data taken from a Cu/SiO/sub 2/ 90 nm process test chip.
Keywords :
RLC circuits; circuit optimisation; clocks; copper; silicon compounds; Cu-SiO/sub 2/; RLC parasitic extraction; circuit model optimization; inductance structures; interconnects modeling; multi-GHz clock network design; Circuit simulation; Clocks; Data mining; Design optimization; Frequency; Inductance; Integrated circuit interconnections; Proximity effect; RLC circuits; Semiconductor device measurement;
Conference_Titel :
Gallium Arsenide and Other Semiconductor Application Symposium, 2005. EGAAS 2005. European
Conference_Location :
Paris
Print_ISBN :
88-902012-0-7
