DocumentCode
2027605
Title
A self-diagnostic airbag accelerometer with skew-symmetric proof-mass
Author
Ko, Jong Soo ; Kim, Gyu Hyun ; Cho, Young-Ho ; Lee, Kwayro ; Kwak, Byung Man ; Park, Kwanhum
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
163
Keywords
Accelerometers; Anisotropic magnetoresistance; Damping; Fabrication; Piezoresistance; Resistors; Resonant frequency; Silicon; Structural beams; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472587
Filename
472587
Link To Document