DocumentCode :
2027605
Title :
A self-diagnostic airbag accelerometer with skew-symmetric proof-mass
Author :
Ko, Jong Soo ; Kim, Gyu Hyun ; Cho, Young-Ho ; Lee, Kwayro ; Kwak, Byung Man ; Park, Kwanhum
fYear :
1995
fDate :
29 Jan-2 Feb 1995
Firstpage :
163
Keywords :
Accelerometers; Anisotropic magnetoresistance; Damping; Fabrication; Piezoresistance; Resistors; Resonant frequency; Silicon; Structural beams; Thermal stresses;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
Type :
conf
DOI :
10.1109/MEMSYS.1995.472587
Filename :
472587
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2027605
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