Title :
Nonlinearity and hysteresis of resonant strain gauges
Author :
Gui, Chengqun ; Legtenberg, Rob ; Tilmans, Harrie A C ; Fluitman, Jan H J ; Elwenspoek, Miko
fDate :
29 Jan-2 Feb 1995
Keywords :
Capacitive sensors; Geometry; Hysteresis; Nonlinear equations; Q factor; Resonance; Resonant frequency; Springs; Tensile stress; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472588
