Title :
Fabrication of a single crystalline silicon capacitive lateral accelerometer using micromachining based on single step plasma etching
Author :
Li, Y.X. ; French, P.J. ; Sarro, P.M. ; Wolffenbuttel, R.F.
fDate :
29 Jan-2 Feb 1995
Keywords :
Accelerometers; Anisotropic magnetoresistance; Crystallization; Etching; Fabrication; Micromachining; Plasma applications; Plasma chemistry; Plasma immersion ion implantation; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472592
