Title : 
Back-illuminated Large-area High-speed In0.53Ga0.47As/In0.52Al0.48As MSM Photodetector
         
        
            Author : 
Griem, H. Torsten ; Kim, Jae H. ; Friedman, Robert A. ; Chan, Eric Y. ; Ray, Sankar
         
        
            Author_Institution : 
Boeing Defense & Space Group
         
        
        
        
        
        
            Keywords : 
Absorption; Bandwidth; Dark current; Detectors; Electrons; Fingers; Packaging; Parasitic capacitance; Photodetectors; Voltage;
         
        
        
        
            Conference_Titel : 
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
         
        
            Print_ISBN : 
0-7803-0526-4
         
        
        
            DOI : 
10.1109/LEOS.1992.694043