Evaluation of the micro wobble motor fabricated by concentric build-up process

Author

Nakamura, K. ; Ogura, H. ; Maeda, S. ; Sangawa, U. ; Aoki, S. ; Sato, T.

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

374

Keywords

Electrodes; Fabrication; Friction; Micromotors; Motion measurement; Rotors; Sputtering; Stators; Torque; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

DOI

10.1109/MEMSYS.1995.472593

Filename

472593

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