Title :
Fabrication of electrostatic nickel microrelays by nickel surface micromachining
Author :
Roy, Shuvo ; Mehregany, Mehran
fDate :
29 Jan-2 Feb 1995
Keywords :
Contacts; Electrostatics; Fabrication; Lithography; Micromachining; Micromechanical devices; Microrelays; Nickel; Resists; Surface resistance;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472595
