• DocumentCode
    2029737
  • Title

    Fabrication of electrostatic nickel microrelays by nickel surface micromachining

  • Author

    Roy, Shuvo ; Mehregany, Mehran

  • fYear
    1995
  • fDate
    29 Jan-2 Feb 1995
  • Firstpage
    353
  • Keywords
    Contacts; Electrostatics; Fabrication; Lithography; Micromachining; Micromechanical devices; Microrelays; Nickel; Resists; Surface resistance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
  • Print_ISBN
    0-7803-2503-6
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1995.472595
  • Filename
    472595
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2029737