Title :
A differential pressure liquid flow sensor for flow regulation and dosing systems
Author :
Boillat, M.A. ; van der Wiel, A.J. ; Hoogerwerf, A.C. ; de Rooij, N.F.
fDate :
29 Jan-2 Feb 1995
Keywords :
Equations; Fluid flow; Fluid flow control; Fluid flow measurement; Pressure measurement; Sensor phenomena and characterization; Sensor systems; Silicon; Temperature sensors; Viscosity;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472596
