Title :
Carbon dioxide priming of micro liquid systems
Author :
Zengerle, R. ; Leitner, M. ; Kluge, S. ; Richter, A.
fDate :
29 Jan-2 Feb 1995
Keywords :
Atmosphere; Carbon dioxide; Liquids; Microfluidics; Plastics; Pumps; Silicon; Solids; Surface tension; Temperature;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472598
