DocumentCode
2030674
Title
Soft X-ray Projection Lithography
Author
Ceglio, N.M.
Author_Institution
Lawrence Livermore National Laboratory
fYear
1992
fDate
16-19 Nov 1992
Firstpage
481
Lastpage
481
Keywords
Integrated optics; Lithography; Nonhomogeneous media; Optical imaging; Optical reflection; Plasma x-ray sources; Power lasers; Ring lasers; X-ray imaging; X-ray lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN
0-7803-0526-4
Type
conf
DOI
10.1109/LEOS.1992.694054
Filename
694054
Link To Document