Title :
Soft X-ray Projection Lithography
Author_Institution :
Lawrence Livermore National Laboratory
Keywords :
Integrated optics; Lithography; Nonhomogeneous media; Optical imaging; Optical reflection; Plasma x-ray sources; Power lasers; Ring lasers; X-ray imaging; X-ray lasers;
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
DOI :
10.1109/LEOS.1992.694054
