DocumentCode
2030809
Title
Ultrasound barrier based on packaged micromachined membrane resonators
Author
Hornung, M. ; Frey, R. ; Brand, O. ; Baltes, H. ; Hafner, C.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
334
Keywords
Acoustic transducers; Biomembranes; Etching; Fabrication; Object detection; Packaging; Silicon; Textile industry; Ultrasonic imaging; Ultrasonic transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472599
Filename
472599
Link To Document