• DocumentCode
    2030837
  • Title

    NEMS based tools for nanoscience and atomic clocks

  • Author

    de Rooij, N.F. ; Gautsch, S. ; Akiyama, Toyokazu ; Loizeau, F. ; Milet, G. ; Petremand, Y. ; Staufer, U. ; Straessle, Rahel ; Yoshikawa, G.

  • Author_Institution
    Sensors Actuators & Microsyst. Lab. (SAMLAB), Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland
  • fYear
    2012
  • fDate
    5-8 March 2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Nanoscience is a thriving multi-disciplinary activity, which aims at understanding the properties and the interaction of very small objects on the nanometer scale. In this endeavor, tools for the observation, analysis and modification of individual objects like macromolecules, clusters or even single atoms are required. The development of dedicated microfabricated instruments to measure physical and chemical interactions at this scale is therefore required. This talk will give an overview of microfabrication techniques employed to shape such NEMS based tools and introduce the audience to several probing techniques. In a second part, we focus on the principles and fabrication techniques of atomic clocks.
  • Keywords
    atomic clocks; nanoelectromechanical devices; nanofabrication; NEMS based tool; atomic clocks; chemical interaction measurement; macromolecules; microfabricated instrument; microfabrication technique; nanometer scale; nanoscience; physical interaction measurement; probing technique; Imaging; Nanoelectromechanical systems; Nanoscale devices; Polymers; Stress; Surface topography; AFM; Arthoscope; Insulated conductive probes; MSS; Mars; NEMS; SNOM; atomic clocks;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
  • Conference_Location
    Kyoto
  • Print_ISBN
    978-1-4673-1122-9
  • Type

    conf

  • DOI
    10.1109/NEMS.2012.6196702
  • Filename
    6196702