Title :
Strain sensitive resonant gate transistor
Author :
Yoshida, Tukashi ; Kudo, Tukuhiro ; Kato, Shigeo ; Miyazaki, S. ; Kiyono, Shinjiro ; Ikeda, Ken-ichi
fDate :
29 Jan-2 Feb 1995
Keywords :
Capacitive sensors; Electrostatics; Force sensors; MOSFETs; Micromachining; Resonance; Resonant frequency; Silicon; Structural beams; Substrates;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472602
