DocumentCode :
2031852
Title :
A New Approach for Gaussian Filter in Surface Metrology
Author :
Hao, Zhang ; Yibao, Yuan
Author_Institution :
Sch. of Electr. Eng. & Autom., Harbin Inst. of Technol., Harbin
fYear :
2009
fDate :
23-24 May 2009
Firstpage :
1
Lastpage :
5
Abstract :
Gaussian filter is a standard filter in surface metrology recommended by ISO11562. Its recognized problem is called "end effect". In order to overcome this disadvantage, a new approach based on approximating spline is developed to realize Gaussian profile filter. First, the configuration of approximating spline filter is investigated, and it describes that this filter inherits all the characteristics of ordinary spline filter e.g. no phase distortion and no end effect. Then, the approximating coefficient selection is discussed. This filter can approximate to Gaussian with little 4.36% deviation. Moreover, the approximating deviation can be decreased to less than 1%, when cascaded approximating spline is adopted. It is proved that approximating spline filter not only accords with the transmission characteristics of ISO, but restrains the end distortion on data sequence. So, it is also named spline achievement of Gaussian filter. Finally, the whole computational procedure is illustrated and applied to a workpiece to acquire mean line. The experimental results indicate that the filtering computation of this new algorithm for 11200 data points on general computer only spends 130 ms.
Keywords :
Gaussian processes; filtering theory; splines (mathematics); surface topography measurement; Gaussian profile filter; ISO11562; approximating coefficient selection; approximating spline filter; data sequence; end effect problem; spline achievement; surface metrology; Automation; Convolution; Equations; Filtering; Filters; Matrices; Metrology; Robustness; Spline; Surface fitting;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Intelligent Systems and Applications, 2009. ISA 2009. International Workshop on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-3893-8
Electronic_ISBN :
978-1-4244-3894-5
Type :
conf
DOI :
10.1109/IWISA.2009.5072643
Filename :
5072643
Link To Document :
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