DocumentCode :
2031876
Title :
A quantitative analysis of Scratch Drive Actuator using buckling motion
Author :
Akiyama, Terunobu ; Fujita, Hiroyuki
fYear :
1995
fDate :
29 Jan-2 Feb 1995
Firstpage :
310
Keywords :
Capacitive sensors; Electrostatic actuators; Force measurement; Insulation; Insulators; Microactuators; Motion analysis; Pulse generation; Substrates; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
Type :
conf
DOI :
10.1109/MEMSYS.1995.472603
Filename :
472603
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2031876
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