DocumentCode

2031933

Title

Integrated niobium thin film air bridges as variable capacitors for GHz tuning circuits

Author

Schicke, M. ; Schuster, K.F.

Author_Institution

Institut de Radio Astronomie Millimetrique, IRAM

fYear

2002

fDate

2002

Firstpage

179

Lastpage

181

Keywords

Bridge circuits; Capacitance; Capacitors; Circuit optimization; Electronic circuits; Fabrication; Niobium; Resists; Superconducting filters; Thin film circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Low Temperature Electronics, 2002. Proceedings of the 5th European Workshop on

ISSN

1155-4339

Print_ISBN

2-86883-606-2

Type

conf

DOI

10.1109/WOLTE.2002.1022477

Filename

1022477