Title :
Integrated niobium thin film air bridges as variable capacitors for GHz tuning circuits
Author :
Schicke, M. ; Schuster, K.F.
Author_Institution :
Institut de Radio Astronomie Millimetrique, IRAM
Keywords :
Bridge circuits; Capacitance; Capacitors; Circuit optimization; Electronic circuits; Fabrication; Niobium; Resists; Superconducting filters; Thin film circuits;
Conference_Titel :
Low Temperature Electronics, 2002. Proceedings of the 5th European Workshop on
Print_ISBN :
2-86883-606-2
DOI :
10.1109/WOLTE.2002.1022477
