Title :
2-dimensional optical scanner applying a torsional resonator with 2 degrees of freedom
Author :
Ohtuka, Yoshinori ; Nishikawa, Hideaki ; Koumura, Tsukasa ; Hattori, Tadashi
fDate :
29 Jan-2 Feb 1995
Keywords :
Actuators; Gravity; Information systems; Integrated optics; Mirrors; Optical devices; Optical resonators; Resonance; Resonant frequency; Robustness;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472604
